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Bücher Wissen & Bildung Englische Bücher Naturwissenschaft, Medizin, Informatik, Technik Physik & Astronomie Atomphysik & Kernphysik Reliability of High Mobility SiGe Channel MOSFETs for Future CMOS Applications
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Reliability of High Mobility SiGe Channel MOSFETs for Future CMOS Applications
Jacopo Franco, Ben Kaczer, Guido Groeseneken (Gebundene Ausgabe, Englisch)
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Beschreibung
Due to the ever increasing electric fields in scaled CMOS devices, reliability is becoming a showstopper for further scaled technology nodes. Although several groups have already demonstrated functional Si channel devices with aggressively scaled Equivalent Oxide Thickness (EOT) down to 5Å, a 10 year reliable device operation cannot be guaranteed anymore due to severe Negative Bias Temperature… Instability. This book focuses on the reliability of the novel (Si)Ge channel quantum well pMOSFET technology. This technology is being considered for possible implementation in next CMOS technology nodes, thanks to its benefit in terms of carrier mobility and device threshold voltage tuning. We observe that it also opens a degree of freedom for device reliability optimization. By properly tuning the device gate stack, sufficiently reliable ultra-thin EOT devices with a 10 years lifetime at operating conditions are demonstrated. The extensive experimental datasets collected on a variety of processed 300mm wafers and presented here show the reliability improvement to be process - and architecture-independent and, as such, readily transferable to advanced device architectures as Tri-Gate (finFET) devices. We propose a physical model to understand the intrinsically superior reliability of the MOS system consisting of a Ge-based channel and a SiO2/HfO2 dielectric stack. The improved reliability properties here discussed strongly support (Si)Ge technology as a clear frontrunner for future CMOS technology nodes. Dieses Produkt haben wir gerade leider nicht auf Lager.
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Technische Daten
Erscheinungsdatum
29.10.2013
Sprache
Englisch
EAN
9789400776623
Herausgeber
Springer Netherland
Serien- oder Bandtitel
Springer Series in Advanced Microelectronics
Sonderedition
Nein
Autor
Jacopo Franco, Ben Kaczer, Guido Groeseneken
Seitenanzahl
187
Auflage
1
Einbandart
Gebundene Ausgabe
Hersteller: Springer Nature Customer Service Center GmbH, Europaplatz 3, Heidelberg, Deutschland, 69115, ProductSafety@springernature.com
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