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Bücher Englische Bücher Wissen & Bildung Naturwissenschaft, Medizin, Informatik, Technik Physik & Astronomie Atomphysik & Kernphysik Ion Implantation in Semiconductors
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Beschreibung
The technique of ion implantation has become a very useful and stable technique in the field of semiconductor device fabrication. This use of ion implantation is being adopted by industry. Another important application is the fundamental study of the physical properties of materials. The First Conference on Ion Implantation in Semiconductors was held at Thousand Oaks, California in 1970. The… second conference in this series was held at Garmish-Partenkirchen, Germany, in 1971. At the third conference, which convened at Yorktown Heights, New York in 1973, the emphasis was broadened to include metals and insulators as well as semiconductors. This scope of the conference was still accepted at the fourth conference which was held at Osaka, Japan, in 1974. A huge number of papers had been submitted to this conference. All papers which were presented at the Fourth International Conference on Ion Implantation in Semiconductors and Other Materials are included in this proceedings. The success of this conference was due to technical presentations and discussions of 224 participants from 14 countries as well as to financial support from many companies in Japan. On behalf of the committee, I wish to thank the authors for their excellent papers and the sponsors for their financial support. The International Committee responsible for advising this conference consisted of B.L. Crowder, J.A. Davies, G. Dearna1ey, F.H. Eisen, Ph. G1otin, T. Itoh, A.U. MacRae, J.W. Mayer, S. Namba, I. Ruge, and F.L. Vook. 53,49 €
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Technische Daten
Erscheinungsdatum
29.04.2013
Sprache
Englisch
EAN
9781468421538
Herausgeber
Springer US
Sonderedition
Nein
Seitenanzahl
742
Einbandart
Broschiert
Buch Untertitel
Science and Technology
Schlagwörter
ESR, Plantation, chemistry, corrosion, crystal, diffusion, electron, metals, paper, scattering, semiconductor, thin films
Thema-Inhalt
PHFC - Physik der kondensierten Materie (Flüssigkeits- und Festkörperphysik)
PNFS - Spektroskopie, Spektrochemie, Massenspektrometrie
Höhe
254 mm
Breite
17.8 cm
Transparenz & Sicherheit
Hersteller: Springer, Europaplatz 3, Heidelberg, Deutschland, 69115, ProductSafety@springernature.com, Springer Nature Customer Service Center GmbH
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