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Bücher Englische Bücher Wissen & Bildung Naturwissenschaft, Medizin, Informatik, Technik Chemie Physikalische Chemie Particles in Gases and Liquids 1
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Particles in Gases and Liquids 1
(Gebundene Ausgabe, Englisch)
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Beschreibung
This book documents the proceedings of the Symposium on Particles in Fluids: Detection, Characterization and Control held as a part of the 18th Fine Particle Society meeting in Boston, August 3-7, 1987. This was the Premier symposium on this topic and the response was so good that we have decided to organize it on a biennial basis and the second symposium will be held under the rubric Particles in… Gases and Liquids: Detection, Characterization and Control at the 20th Fine Particle Society meeting in Boston, August 22-26, 1989. In the modern manufacture of sophisticated and sensitive microelectronic components and other precision parts, there has been a great deal of concern about yield losses due to micrometer- and submicrometer-sized particles. These particles can originate from a number of sources including fluids, i. e. , gases and liquids used in the manufacturing process. So the detection, characterization and control or removal of these undesirable particles is of cardinal importance and this symposium was conceived and o~ganized with this in mind. The purposes of this symposium were to bring together those actively involved in all aspects of particles in fluids, to provide a forum for discussion of the latest techniques for the detection, characterization and control of particles, and to highlight areas which needed intensified R&D efforts. The printed program contained a total of 46 papers and a variety of topics dealing with various ramifications of particles in fluids were presented. Dieses Produkt haben wir gerade leider nicht auf Lager.
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Technische Daten
Erscheinungsdatum
30.06.1989
Sprache
Englisch
EAN
9780306431517
Herausgeber
Springer US
Sonderedition
Nein
Seitenanzahl
312
Auflage
1
Einbandart
Gebundene Ausgabe
Buch Untertitel
Detection, Characterization, and Control
Schlagwörter
In silico, contamination, distribution, electron, electron microscope, influence, laminar flow, paper, particles, scanning electron microscope, semiconductor, silicon, society, water
Thema-Inhalt
PNR - Physikalische Chemie
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