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Bücher Englische Bücher Wissen & Bildung Naturwissenschaft, Medizin, Informatik, Technik Technik Elektronik, Elektro- und Nachrichtentechnik AlGaN/GaN-Based Pressure Sensors for Application in Harsh Environments
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AlGaN/GaN-Based Pressure Sensors for Application in Harsh Environments
Matthias Moser (Broschiert, Englisch)
★★★★★
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Optischer Zustand
Beschreibung
The ability to sense and respond reliably in extreme environments is crucial for advancing technologies in space, aeronautics, automotive, and energy applications. Conventional silicon-based sensors face intrinsic material limitations under such conditions, where high temperatures, radiation, and mechanical stress degrade their performance. Gallium nitride (GaN), with its wide bandgap, high… thermal stability, and mechanical robustness, offers a promising alternative for sensor technologies operating beyond the limits of silicon. This work investigates the design, fabrication, and characterization of GaN-based pressure sensors developed for stable and precise measurements in harsh environments. A Wheatstone-bridge configuration integrating High Electron Mobility Transistors (HEMTs) enables high sensitivity, excellent linearity, and low power consumption. The fabrication process combines front-end and back-end integration steps within an Au-free technology platform and includes backside micromachining for circular and bossed membrane structures. Experimental evaluation under controlled temperature and pressure conditions demonstrates reliable operation and strong agreement with simulation results. The study further explores the potential of gated HEMT devices to enhance sensitivity through electrical tuning, enabling flexible operation across different measurement ranges.
The results highlight the suitability of GaN for highly resilient, low-power, and integrable sensor systems, offering a robust foundation for future research on signal conditioning and temperature compensation. Overall, this work contributes to the advancement of GaN pressure sensing technologies capable of sustained performance in extreme and mission-critical environments. Dieses Produkt haben wir gerade leider nicht auf Lager.
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Technische Daten
Erscheinungsdatum
30.12.2025
Sprache
Englisch
EAN
9783819103674
Herausgeber
Shaker
Serien- oder Bandtitel
Berichte aus der Mikrosystemtechnik
Sonderedition
Nein
Autor
Matthias Moser
Seitenanzahl
290
Auflage
1
Einbandart
Broschiert
Schlagwörter
AlGaN, GaN, MEMS, Pressure Sensor, Piezoelectric Effect, Harsh Environment, Membrane
Thema-Inhalt
THR - Elektrotechnik
Höhe
210 mm
Breite
14.8 cm
-.-
★★★★★
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